EE215: Micro-Electro-Mechanical Systems (MEMS) Design

Introduction to MEMS technology: covers basic microfabrication technologies, the governing physics for MEMS devices in different energy domains (mechanical, electrical, optical, thermal, and fluidic). Fabrication and design of MEMS devices illustrated using examples of existing research prototypes and commercial products. Students design, lay out, and fabricate an optical MEMS deformable mirror device for applications in adaptive optics. Students are billed a materials fee. Prerequisite(s): courses 135, 145, and 211; and Physics 5A, 5B, and 5C. Enrollment restricted to seniors and graduate students.

5 credits

Year	Fall	Winter	Spring	Summer

While the information on this web site is usually the most up to date, in the event of a discrepancy please contact your adviser to confirm which information is correct.